JPH052742B2 - - Google Patents

Info

Publication number
JPH052742B2
JPH052742B2 JP4961786A JP4961786A JPH052742B2 JP H052742 B2 JPH052742 B2 JP H052742B2 JP 4961786 A JP4961786 A JP 4961786A JP 4961786 A JP4961786 A JP 4961786A JP H052742 B2 JPH052742 B2 JP H052742B2
Authority
JP
Japan
Prior art keywords
etching
water
solution
hydrogen peroxide
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4961786A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62207887A (ja
Inventor
Yoshiharu Tashiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP4961786A priority Critical patent/JPS62207887A/ja
Publication of JPS62207887A publication Critical patent/JPS62207887A/ja
Publication of JPH052742B2 publication Critical patent/JPH052742B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP4961786A 1986-03-07 1986-03-07 砒化インジウムアルミニウムのエツチング液 Granted JPS62207887A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4961786A JPS62207887A (ja) 1986-03-07 1986-03-07 砒化インジウムアルミニウムのエツチング液

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4961786A JPS62207887A (ja) 1986-03-07 1986-03-07 砒化インジウムアルミニウムのエツチング液

Publications (2)

Publication Number Publication Date
JPS62207887A JPS62207887A (ja) 1987-09-12
JPH052742B2 true JPH052742B2 (en]) 1993-01-13

Family

ID=12836193

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4961786A Granted JPS62207887A (ja) 1986-03-07 1986-03-07 砒化インジウムアルミニウムのエツチング液

Country Status (1)

Country Link
JP (1) JPS62207887A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2730684B2 (ja) * 1991-08-21 1998-03-25 本田技研工業株式会社 化合物半導体の製造方法
KR20050034491A (ko) * 2003-10-09 2005-04-14 (주)이엠피테크놀로지 세라믹 코팅용 알루미늄 전처리제 조성물 및 전처리 방법

Also Published As

Publication number Publication date
JPS62207887A (ja) 1987-09-12

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